Examination of the pulsing phenomena in pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS) of Cr–Al–N thin films - ScienceDirect
a) Schematic of the closed field unbalanced magnetron sputtering... | Download Scientific Diagram
The Mechanical and Tribological Properties of LaB6 Thin Films Deposited by Closed-Field Unbalanced Magnetron Sputtering | SpringerLink
MoSx Coatings by Closed-Field Magnetron Sputtering | SpringerLink
Facilitating Complex Thin Film Deposition by Using Magnetron Sputtering: A Review | JOM
Physics and technology of magnetron sputtering discharges
Microstructure and optical properties of MgO films synthesized by closed-field unbalanced magnetron sputtering with additional electron emission - ScienceDirect
a Schematic of a four-target unbalanced magnetron sputtering system. b... | Download Scientific Diagram